Inventor
CHRISTIANSEN SILKE H
US5 patents
Patents
5 patentsUS6593625B2Jul 15, 2003
Relaxed SiGe layers on Si or silicon-on-insulator substrates by ion implantation and thermal annealing
IBM182 citations98
US6515335B1Feb 4, 2003
Method for fabrication of relaxed SiGe buffer layers on silicon-on-insulators and structures containing the same
IBM214 citations98
US6855649B2Feb 15, 2005
Relaxed SiGe layers on Si or silicon-on-insulator substrates by ion implantation and thermal annealing
IBM90 citations97
US6709903B2Mar 23, 2004
Relaxed SiGe layers on Si or silicon-on-insulator substrates by ion implantation and thermal annealing
IBM86 citations97
US6833332B2Dec 21, 2004
Method for fabrication of relaxed SiGe buffer layers on silicon-on-insulators and structures containing the same
IBM23 citations92