Inventor
LE MINH VAN
US9 patents
⚠️ This page may combine multiple inventors who share the name “LE MINH VAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AXSUN TECH INC
8 patentsUS6836366B1Dec 28, 2004
Integrated tunable fabry-perot filter and method of making same
AXSUN TECH INC107 citations97
US6271052B1Aug 7, 2001
Process for integrating dielectric optical coatings into micro-electromechanical devices
AXSUN TECH INC55 citations95
US6525880B2Feb 25, 2003
Integrated tunable fabry-perot filter and method of making same
AXSUN TECH INC37 citations92
US6707593B2Mar 16, 2004
System and process for actuation voltage discharge to prevent stiction attachment in MEMS device
AXSUN TECH INC18 citations91
US6790698B2Sep 14, 2004
Process for integrating dielectric optical coatings into micro-electromechanical devices
AXSUN TECH INC17 citations83
US6420206B1Jul 16, 2002
Optical membrane singulation process utilizing backside and frontside protective coating during die saw
AXSUN TECH INC9 citations72
US6808276B2Oct 26, 2004
Suspended high reflectivity coating on release structure and fabrication process therefor
AXSUN TECH INC2 citations62
US7450862B2Nov 11, 2008
Stray light insensitive detector system and amplifier
AXSUN TECH INC0 citations37