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Inventor
WALTERS JOSEPH W
US
2 patents
Patents
2 patents
US6767427B2
Jul 27, 2004
Apparatus and method for conditioning polishing pad in a chemical mechanical planarization process
LAM RES CORP
13 citations
76
US6265231B1
Jul 24, 2001
Process control via valve position and rate of position change monitoring
LAM RES CORP
2 citations
54