Inventor
YAMANAKA MICHINARI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “YAMANAKA MICHINARI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD
9 patentsUS5928528AJul 27, 1999
Plasma treatment method and plasma treatment system
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD190 citations98
US6008124ADec 28, 1999
Semiconductor device having improved lamination-structure reliability for buried layers, silicide films and metal films, and a method for forming the same
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD90 citations97
US5780908AJul 14, 1998
Semiconductor apparatus with tungstein nitride
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD46 citations92
US5385867AJan 31, 1995
Method for forming a multi-layer metallic wiring structure
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD40 citations92
US6898851B2May 31, 2005
Electronic device manufacturing method
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD40 citations91
US5312776AMay 17, 1994
Method of preventing the corrosion of metallic wirings
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD28 citations91
US5837616ANov 17, 1998
Dry etching method for aluminum alloy and etching gas therefor
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD8 citations72
US6859023B2Feb 22, 2005
Evaluation method for evaluating insulating film, evaluation device therefor and method for manufacturing evaluation device
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD5 citations62
US7022619B2Apr 4, 2006
Method for fabricating electronic device
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD6 citations61