Inventor
JENNINGS DEAN C
US17 patents
⚠️ This page may combine multiple inventors who share the name “JENNINGS DEAN C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
8 patentsUS6987240B2Jan 17, 2006
Thermal flux processing by scanning
APPLIED MATERIALS INC183 citations98
US6200388B1Mar 13, 2001
Substrate support for a thermal processing chamber
APPLIED MATERIALS INC59 citations95
US7875829B2Jan 25, 2011
Thermal flux processing by scanning a focused line beam
APPLIED MATERIALS INC7 citations83
US7872209B2Jan 18, 2011
Thermal flux processing by scanning a focused line beam
APPLIED MATERIALS INC8 citations83
US7993465B2Aug 9, 2011
Electrostatic chuck cleaning during semiconductor substrate processing
APPLIED MATERIALS INC6 citations68
US7440088B2Oct 21, 2008
Methods and devices for measuring a concentrated light beam
APPLIED MATERIALS INC1 citations52
US7837357B2Nov 23, 2010
Combined illumination and imaging system
APPLIED MATERIALS INC0 citations51
US9737959B2Aug 22, 2017
Thermal processing by scanning a laser line beam
APPLIED MATERIALS INC0 citations49
JENNINGS DEAN C
7 patentsUS8829393B2Sep 9, 2014
Scanned laser light source
JENNINGS DEAN C10 citations91
US8316867B2Nov 27, 2012
Electrostatic chuck cleaning during semiconductor substrate processing
JENNINGS DEAN C5 citations72
US8178819B2May 15, 2012
Thermal flux processing by scanning a focused line beam
JENNINGS DEAN C4 citations72
US8432613B2Apr 30, 2013
Multi-stage optical homogenization
JENNINGS DEAN C2 citations62
US8288685B2Oct 16, 2012
Thermal flux processing by scanning a focused line beam
JENNINGS DEAN C1 citations61
US8796769B2Aug 5, 2014
Thermal flux annealing influence of buried species
JENNINGS DEAN C0 citations51
US8288239B2Oct 16, 2012
Thermal flux annealing influence of buried species
JENNINGS DEAN C0 citations51