Inventor
O'BRIEN PAUL A
US9 patents
⚠️ This page may combine multiple inventors who share the name “O'BRIEN PAUL A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS6987240B2Jan 17, 2006
Thermal flux processing by scanning
APPLIED MATERIALS INC183 citations98
US6183130B1Feb 6, 2001
Apparatus for substrate temperature measurement using a reflecting cavity and detector
APPLIED MATERIALS INC71 citations94
US6406179B2Jun 18, 2002
Sensor for measuring a substrate temperature
APPLIED MATERIALS INC35 citations91
US7875829B2Jan 25, 2011
Thermal flux processing by scanning a focused line beam
APPLIED MATERIALS INC7 citations83
US7872209B2Jan 18, 2011
Thermal flux processing by scanning a focused line beam
APPLIED MATERIALS INC8 citations83
US9737959B2Aug 22, 2017
Thermal processing by scanning a laser line beam
APPLIED MATERIALS INC0 citations49