Inventor
TERTITSKI LEONID M
US17 patents
⚠️ This page may combine multiple inventors who share the name “TERTITSKI LEONID M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
11 patentsUS6987240B2Jan 17, 2006
Thermal flux processing by scanning
APPLIED MATERIALS INC183 citations98
US7875829B2Jan 25, 2011
Thermal flux processing by scanning a focused line beam
APPLIED MATERIALS INC7 citations83
US7872209B2Jan 18, 2011
Thermal flux processing by scanning a focused line beam
APPLIED MATERIALS INC8 citations83
US10571337B2Feb 25, 2020
Thermal cooling member with low temperature control
APPLIED MATERIALS INC2 citations72
US10109514B2Oct 23, 2018
Visual feedback for process control in RTP chambers
APPLIED MATERIALS INC3 citations71
US9735034B2Aug 15, 2017
Visual feedback for process control in RTP chambers
APPLIED MATERIALS INC3 citations71
US7778533B2Aug 17, 2010
Semiconductor thermal process control
APPLIED MATERIALS INC5 citations71
US9959610B2May 1, 2018
System and method to detect substrate and/or substrate support misalignment using imaging
APPLIED MATERIALS INC2 citations69
US10948353B2Mar 16, 2021
Thermal processing chamber with low temperature control
APPLIED MATERIALS INC0 citations62
US12230521B2Feb 18, 2025
Method for non-contact low substrate temperature measurement
APPLIED MATERIALS INC0 citations60
US7667162B2Feb 23, 2010
Semiconductor thermal process control utilizing position oriented temperature generated thermal mask
APPLIED MATERIALS INC2 citations60