Inventor
RYZHIKOV LEV
US29 patents
⚠️ This page may combine multiple inventors who share the name “RYZHIKOV LEV”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
16 patentsUS7187430B2Mar 6, 2007
Advanced illumination system for use in microlithography
ASML HOLDING NV10 citations82
US6775069B2Aug 10, 2004
Advanced illumination system for use in microlithography
ASML HOLDING NV18 citations80
US7227613B2Jun 5, 2007
Lithographic apparatus having double telecentric illumination
ASML HOLDING NV8 citations73
US7859647B2Dec 28, 2010
Lithographic apparatus and device manufacturing method
ASML HOLDING NV7 citations71
US12523941B2Jan 13, 2026
Lithographic pre-alignment imaging sensor with build-in coaxial illumination
ASML HOLDING NV0 citations62
US11960216B2Apr 16, 2024
Invariable magnification multilevel optical device with telecentric converter
ASML HOLDING NV0 citations62
US11754935B2Sep 12, 2023
Lithographic patterning device multichannel position and level gauge
ASML HOLDING NV0 citations62
US7859756B2Dec 28, 2010
Optical system for transforming numerical aperture
ASML HOLDING NV3 citations62
US7532403B2May 12, 2009
Optical system for transforming numerical aperture
ASML HOLDING NV2 citations62
US7289277B2Oct 30, 2007
Relay lens used in an illumination system of a lithography system
ASML HOLDING NV3 citations62
US9411244B2Aug 9, 2016
Optical system, inspection system and manufacturing method
ASML HOLDING NV2 citations61
US8013979B2Sep 6, 2011
Illumination system with low telecentricity error and dynamic telecentricity correction
ASML HOLDING NV2 citations61
US7630136B2Dec 8, 2009
Optical integrators for lithography systems and methods
ASML HOLDING NV3 citations56
US9671337B2Jun 6, 2017
High numerical aperture objective lens system
ASML HOLDING NV0 citations52
US9513559B2Dec 6, 2016
High numerical aperture objective lens system
ASML HOLDING NV0 citations52
US7365848B2Apr 29, 2008
System and method using visible and infrared light to align and measure alignment patterns on multiple layers
ASML HOLDING NV6 citations52
NIKON CORP
3 patentsUS5898524AApr 27, 1999
Microscope objective with ball lens and protection plate
NIKON CORP23 citations92
US5886827AMar 23, 1999
Microscope objective lens with separated lens groups
NIKON CORP9 citations74
US5808807ASep 15, 1998
Microscope objective lens with cemented biconvex triplet
NIKON CORP12 citations74