Inventor
AUGUSTYN WALTER
US5 patents
⚠️ This page may combine multiple inventors who share the name “AUGUSTYN WALTER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
4 patentsUS7187430B2Mar 6, 2007
Advanced illumination system for use in microlithography
ASML HOLDING NV10 citations82
US6775069B2Aug 10, 2004
Advanced illumination system for use in microlithography
ASML HOLDING NV18 citations80
US6819402B2Nov 16, 2004
System and method for laser beam expansion
ASML HOLDING NV8 citations71
US7006198B2Feb 28, 2006
System and method for laser beam expansion
ASML HOLDING NV0 citations49