Inventor

HALE JEFFREY S

US34 patents

⚠️ This page may combine multiple inventors who share the name “HALE JEFFREY S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HALE JEFFREY S

J A WOOLLAM CO INC

Discrete polarization state spectroscopic ellipsometer system and method of use

Discrete polarization state spectroscopic ellipsometer system and method of use

Fast sample height, AOI and POI alignment in mapping ellipsometer or the like

Method of determining substrate etch depth

Spectroscopic ellipsometer and polarimeter systems

Application of intermediate wavelength band spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters

Application of spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters

Ellipsometer meeting scheimpflug condition with provision of an essentially circular electromagnetic radiation spot on a sample

Method of determining initial thickness value for sample surface layer, and use of splines for fitting ellipsometric data

Rotating or rotatable compensator system providing aberation corrected electromagnetic raadiation to a spot on a sample at multiple angles of a incidence

Combined spatial filter and relay systems in rotating compensator ellipsometer/polarimeter

Rotating or rotatable compensator spectroscopic ellipsometer system including multiple element lenses

Beam splitting analyzer means in rotating compensator ellipsometer

Beam focusing and reflecting optics with enhanced detector system

Beam focusing and beam collecting optics with wavelength dependent filter element adjustment of beam area

Beam focusing and beam collecting optics

Reflective focusing optics

Method to analyze spectroscopic ellipsometry or intensity data of porous samples utilizing the anisotropic bruggeman-effective medium theory

Method to analyze spectroscopic ellipsometry data of porous samples utilizing the anisotropic Bruggeman-effective medium theory

Beam focusing and reflective optics

Sample investigating system

Broadband ellipsometer or polarimeter system including at least one multiple element lens

Beam chromatic shifting and directing means

Ellipsometer or polarimeter and the like system with beam chromatic shifting and directing means

Beam focusing and reflective optics

Reflectometer, spectrophotometer, ellipsometer and polarimeter system with a super continuum laser source of a beam of electromagnetism, and improved detector system

Deviation angle self-compensating substantially achromatic retarder

J A WOOLLAM CO

Discrete polarization state rotatable compensator spectroscopic ellipsometer system, and method of calibration

Application of spectroscopic ellipsometry to in situ real time fabrication of multiple alternating high/low refractive index narrow bandpass optical filters

LIPHARDT MARTIN M

Fast sample height, AOI and POI alignment in mapping ellipsometer or the like

Sample investigating system and method of use

PFEIFFER GALEN L

In line ellipsometer system and method of use

HALE JEFFREY S

Method of characterizing a beam of electromagnetic radiation in ellipsometer and the like systems

HASSLER CHRISTOPHER D

Ellipsometer or polarimeter system having at least one rotating element which is driven by a motor comprising air bearing