Inventor
YUAN TIEN-MIN
TW7 patents
Patents
7 patentsUS6080627AJun 27, 2000
Method for forming a trench power metal-oxide semiconductor transistor
MOSEL VITELIC INC20 citations89
US7205196B2Apr 17, 2007
Manufacturing process and structure of integrated circuit
MOSEL VITELIC INC10 citations82
US6374833B1Apr 23, 2002
Method of in situ reactive gas plasma treatment
MOSEL VITELIC INC14 citations79
US6299788B1Oct 9, 2001
Silicon etching process
MOSEL VITELIC INC10 citations71
US7271048B2Sep 18, 2007
Method for manufacturing trench MOSFET
MOSEL VITELIC INC2 citations61
US6273962B1Aug 14, 2001
Method to reduce the particles in load-lock chamber
MOSEL VITELIC INC2 citations58
US6403489B1Jun 11, 2002
Method for removing polymer stacked on a lower electrode within an etching reaction chamber
MOSEL VITELIC INC3 citations56