Inventor
JUSCHKIN LARISSA
DE5 patents
⚠️ This page may combine multiple inventors who share the name “JUSCHKIN LARISSA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA CORP
3 patentsUS11968772B2Apr 23, 2024
Optical etendue matching methods for extreme ultraviolet metrology
KLA CORP0 citations58
US11499924B2Nov 15, 2022
Determining one or more characteristics of light in an optical system
KLA CORP0 citations56
US11293880B2Apr 5, 2022
Method and apparatus for beam stabilization and reference correction for EUV inspection
KLA CORP0 citations41