Inventor

LEBERT RAINER

BE6 patents

⚠️ This page may combine multiple inventors who share the name “LEBERT RAINER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS STIFTUNG

1 patent

US5023897AJun 11, 1991

Device for generating X-radiation with a plasma source

ZEISS STIFTUNG131 citations93

FRAUNHOGER GES ZUR FOERDERUNG

1 patent

US6389106B1May 14, 2002

Method and device for producing extreme ultraviolet and soft X-rays from a gaseous discharge

FRAUNHOGER GES ZUR FOERDERUNG31 citations89

FRAUNHOFER GES FORSCHUNG

1 patent

US6788763B1Sep 7, 2004

Device for producing an extreme ultraviolet and soft x radiation from a gaseous discharge

FRAUNHOFER GES FORSCHUNG11 citations72

AIXUV GMBH

1 patent

US6856395B2Feb 15, 2005

Reflectometer arrangement and method for determining the reflectance of selected measurement locations of measurement objects reflecting in a spectrally dependent manner

AIXUV GMBH4 citations51

QIMONDA AG

1 patent

US7378666B2May 27, 2008

Irradiation device for testing objects coated with light-sensitive paint

QIMONDA AG1 citations43

RI RES INSTRUMENTS GMBH

1 patent

US11615897B2Mar 28, 2023

Microscopic system for testing structures and defects on EUV lithography photomasks

RI RES INSTRUMENTS GMBH0 citations33