P

Inventor

MORIMITSU KAZUHIRO

JP14 patents
⚠️ This page may combine multiple inventors who share the name “MORIMITSU KAZUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI INT ELECTRIC INC

9 patents
US9412582B2Aug 9, 2016

Reaction tube, substrate processing apparatus, and method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC464 citations98
US7198447B2Apr 3, 2007

Semiconductor device producing apparatus and producing method of semiconductor device

HITACHI INT ELECTRIC INC462 citations97
US6737613B2May 18, 2004

Heat treatment apparatus and method for processing substrates

HITACHI INT ELECTRIC INC21 citations92
US9487863B2Nov 8, 2016

Substrate processing apparatus

HITACHI INT ELECTRIC INC8 citations84
US7455734B2Nov 25, 2008

Substrate processing apparatus, substrate holder, and manufacturing method of semiconductor device

HITACHI INT ELECTRIC INC13 citations83
US9163309B2Oct 20, 2015

Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium

HITACHI INT ELECTRIC INC5 citations73
US9070554B2Jun 30, 2015

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC4 citations73
US9064695B1Jun 23, 2015

Substrate processing apparatus, non-transitory computer-readable recording medium and method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC5 citations73
US9502236B2Nov 22, 2016

Substrate processing apparatus, non-transitory computer-readable recording medium and method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC0 citations52

KOKUSAI ELECTRIC CORP

3 patents
US10424520B1Sep 24, 2019

Method of manufacturing semiconductor device

KOKUSAI ELECTRIC CORP15 citations85
US10978361B2Apr 13, 2021

Substrate processing apparatus and recording medium

KOKUSAI ELECTRIC CORP0 citations62
US10714316B2Jul 14, 2020

Method of manufacturing semiconductor device

KOKUSAI ELECTRIC CORP0 citations41

FUKUDA MASANAO

1 patent
US9074284B2Jul 7, 2015

Heat treatment apparatus

FUKUDA MASANAO7 citations78

HIROCHI YUKITOMO

1 patent
US9084298B2Jul 14, 2015

Substrate processing apparatus including shielding unit for suppressing leakage of magnetic field

HIROCHI YUKITOMO1 citations45