Inventor
BUEHRER FRED
US4 patents
Patents
4 patentsUS7491964B2Feb 17, 2009
Nitridation of STI fill oxide to prevent the loss of STI fill oxide during manufacturing process
IBM5 citations72
US7491563B2Feb 17, 2009
Nitridation of STI fill oxide to prevent the loss of STI fill oxide during manufacturing process
IBM3 citations61
US7235440B2Jun 26, 2007
Formation of ultra-thin oxide layers by self-limiting interfacial oxidation
IBM5 citations59
US7202186B2Apr 10, 2007
Method of forming uniform ultra-thin oxynitride layers
IBM1 citations49