Inventor
CHANG CHIENLIU
JP30 patents
⚠️ This page may combine multiple inventors who share the name “CHANG CHIENLIU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
10 patentsUS7767106B2Aug 3, 2010
Method of dry etching oxide semiconductor film
CANON KK137 citations98
US7960289B2Jun 14, 2011
Etching method, pattern forming process, thin-film transistor fabrication process, and etching solution
CANON KK20 citations92
US8371018B2Feb 12, 2013
Electromechanical transducer and manufacturing method therefor
CANON KK14 citations84
US8039836B2Oct 18, 2011
Semiconductor device
CANON KK10 citations84
US9282415B2Mar 8, 2016
Electromechanical transducer and method for manufacturing the same which suppresses lowering of sensitivity while a protective layer is formed
CANON KK1 citations63
US8034248B2Oct 11, 2011
Dry etching method for oxide semiconductor film
CANON KK2 citations63
US7959843B2Jun 14, 2011
Method of fabricating structure
CANON KK2 citations62
US8754490B2Jun 17, 2014
Element array with a plurality of electromechanical conversion devices
CANON KK3 citations61
US10207918B2Feb 19, 2019
Electromechanical transducer and method for manufacturing the same which suppresses lowering of sensitivity while a protective layer is formed
CANON KK0 citations52
US9698705B2Jul 4, 2017
Electromechanical transducer device and analyte information acquiring apparatus
CANON KK0 citations52
CHANG CHIENLIU
6 patentsUS8168544B2May 1, 2012
Oxide etching method
CHANG CHIENLIU127 citations97
US8531527B2Sep 10, 2013
Acoustic-wave sensor, acoustic-wave sensor array, and ultrasonic imaging apparatus
CHANG CHIENLIU9 citations84
US8760031B2Jun 24, 2014
Electromechanical transducer and method for manufacturing the same which suppresses lowering of sensitivity while a protective layer is formed
CHANG CHIENLIU7 citations83
US8426235B2Apr 23, 2013
Method for manufacturing capacitive electromechanical transducer
CHANG CHIENLIU9 citations83
US8288192B2Oct 16, 2012
Method of manufacturing a capacitive electromechanical transducer
CHANG CHIENLIU11 citations83
US8410659B2Apr 2, 2013
Electromechanical transducer and manufacturing method therefor
CHANG CHIENLIU4 citations62
INVENSENSE INC
4 patentsUS11577276B2Feb 14, 2023
Piezoelectric micromachined ultrasound transducer device with multi-layer etched isolation trench
INVENSENSE INC0 citations62
US11515465B2Nov 29, 2022
EMI reduction in piezoelectric micromachined ultrasound transducer array
INVENSENSE INC1 citations57
US11563166B2Jan 24, 2023
Piezoelectric poling of a wafer with temporary and permanent electrodes
INVENSENSE INC0 citations52
US11623246B2Apr 11, 2023
Piezoelectric micromachined ultrasound transducer device with piezoelectric barrier layer
INVENSENSE INC0 citations49
KANDORI ATSUSHI
3 patentsUS8339014B2Dec 25, 2012
Oscillator device
KANDORI ATSUSHI11 citations84
US8928042B2Jan 6, 2015
Structure having plural conductive regions and process for production thereof
KANDORI ATSUSHI2 citations63
US8596121B2Dec 3, 2013
Structural member having a plurality of conductive regions
KANDORI ATSUSHI0 citations42
KATO AYAKO
3 patentsUS8099854B2Jan 24, 2012
Manufacturing method of an electromechanical transducer
KATO AYAKO7 citations82
US8087152B2Jan 3, 2012
Manufacturing method of an electromechanical transducer
KATO AYAKO6 citations71
US8087153B2Jan 3, 2012
Manufacturing method of an electromechanical transducer
KATO AYAKO1 citations50