Inventor
CUNNINGHAM SHAWN JAY
US9 patents
⚠️ This page may combine multiple inventors who share the name “CUNNINGHAM SHAWN JAY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
WISPRY INC
4 patentsUS6882264B2Apr 19, 2005
Electrothermal self-latching MEMS switch and method
WISPRY INC80 citations98
US6917086B2Jul 12, 2005
Trilayered beam MEMS device and related methods
WISPRY INC122 citations96
US7385800B2Jun 10, 2008
Micro-electro-mechanical system (MEMS) capacitors, inductors, and related systems and methods
WISPRY INC12 citations83
US11615924B2Mar 28, 2023
MEMS switch
WISPRY INC0 citations50
TURNSTONE SYSTEMS INC
3 patentsUS6847114B2Jan 25, 2005
Micro-scale interconnect device with internal heat spreader and method for fabricating same
TURNSTONE SYSTEMS INC69 citations97
US6876047B2Apr 5, 2005
MEMS device having a trilayered beam and related methods
TURNSTONE SYSTEMS INC109 citations96
US6746891B2Jun 8, 2004
Trilayered beam MEMS device and related methods
TURNSTONE SYSTEMS INC144 citations96
CUNNINGHAM SHAWN JAY
2 patentsUS8264054B2Sep 11, 2012
MEMS device having electrothermal actuation and release and method for fabricating
CUNNINGHAM SHAWN JAY13 citations89
US8420427B2Apr 16, 2013
Methods for implementation of a switching function in a microscale device and for fabrication of a microscale switch
CUNNINGHAM SHAWN JAY1 citations59