Inventor
BALASUBRAMANYAM CHANDRASEKHAR
IN8 patents
⚠️ This page may combine multiple inventors who share the name “BALASUBRAMANYAM CHANDRASEKHAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS9818587B2Nov 14, 2017
Off-angled heating of the underside of a substrate using a lamp assembly
APPLIED MATERIALS INC3 citations72
US9863038B2Jan 9, 2018
Off-angled heating of the underside of a substrate using a lamp assembly
APPLIED MATERIALS INC1 citations61
US8377213B2Feb 19, 2013
Slit valve having increased flow uniformity
APPLIED MATERIALS INC4 citations59
US9423042B2Aug 23, 2016
Slit valve having increased flow uniformity
APPLIED MATERIALS INC0 citations49