Inventor
ZETTLER JOERG-THOMAS
DE5 patents
⚠️ This page may combine multiple inventors who share the name “ZETTLER JOERG-THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZETTLER JOERG-THOMAS
4 patentsUS8514408B2Aug 20, 2013
Method and apparatus for real-time determination of curvature and azimuthal asymmetry of a surface
ZETTLER JOERG-THOMAS6 citations67
US8496375B2Jul 30, 2013
Pyrometer adapted for detecting UV-radiation and use thereof
ZETTLER JOERG-THOMAS3 citations54
US8388219B2Mar 5, 2013
Method for calibrating a pyrometer, method for determining the temperature of a semiconducting wafer and system for determining the temperature of a semiconducting wafer
ZETTLER JOERG-THOMAS3 citations48
US8233158B2Jul 31, 2012
Method and apparatus for determining the layer thickness and the refractive index of a sample
ZETTLER JOERG-THOMAS1 citations39