Inventor
ZILIAN JENS
DE2 patents
Patents
2 patentsUS8496375B2Jul 30, 2013
Pyrometer adapted for detecting UV-radiation and use thereof
ZETTLER JOERG-THOMAS3 citations54
US8388219B2Mar 5, 2013
Method for calibrating a pyrometer, method for determining the temperature of a semiconducting wafer and system for determining the temperature of a semiconducting wafer
ZETTLER JOERG-THOMAS3 citations48