Inventor
METZNER CRAIG R
US13 patents
⚠️ This page may combine multiple inventors who share the name “METZNER CRAIG R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS6858547B2Feb 22, 2005
System and method for forming a gate dielectric
APPLIED MATERIALS INC633 citations98
US6454860B2Sep 24, 2002
Deposition reactor having vaporizing, mixing and cleaning capabilities
APPLIED MATERIALS INC692 citations98
US7067439B2Jun 27, 2006
ALD metal oxide deposition process using direct oxidation
APPLIED MATERIALS INC48 citations94
US7531468B2May 12, 2009
System and method for forming a gate dielectric
APPLIED MATERIALS INC22 citations92
US7304004B2Dec 4, 2007
System and method for forming a gate dielectric
APPLIED MATERIALS INC19 citations92
US7569501B2Aug 4, 2009
ALD metal oxide deposition process using direct oxidation
APPLIED MATERIALS INC17 citations91
US8343279B2Jan 1, 2013
Apparatuses for atomic layer deposition
APPLIED MATERIALS INC26 citations90
US7569500B2Aug 4, 2009
ALD metal oxide deposition process using direct oxidation
APPLIED MATERIALS INC2 citations61
US7674337B2Mar 9, 2010
Gas manifolds for use during epitaxial film formation
APPLIED MATERIALS INC0 citations50