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Inventor
TSUGITA KATSUYUKI
JP
4 patents
⚠️ This page may combine multiple inventors who share the name “TSUGITA KATSUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEIMI CHEM KK
2 patents
US6120571A
Sep 19, 2000
Polishing agent for semiconductor and method for its production
SEIMI CHEM KK
62 citations
90
US6679761B1
Jan 20, 2004
Polishing compound for semiconductor containing peptide
SEIMI CHEM KK
15 citations
79
ASAHI GLASS CO LTD
1 patent
US7378348B2
May 27, 2008
Polishing compound for insulating film for semiconductor integrated circuit and method for producing semiconductor integrated circuit
ASAHI GLASS CO LTD
1 citations
48
TSUGITA KATSUYUKI
1 patent
US8563769B2
Oct 22, 2013
Fluorine-containing compound, fluorine-containing surfactant and compositions containing same
TSUGITA KATSUYUKI
0 citations
43