Inventor
OKADA TAKAYA
JP5 patents
⚠️ This page may combine multiple inventors who share the name “OKADA TAKAYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
3 patentsUS9360763B2Jun 7, 2016
Projection optical system, exposure apparatus, and exposure method
NIKON CORP4 citations83
US9310696B2Apr 12, 2016
Projection optical system, exposure apparatus, and exposure method
NIKON CORP3 citations72
US9429851B2Aug 30, 2016
Projection optical system, exposure apparatus, and exposure method
NIKON CORP2 citations61