Inventor

PURKL FABIAN

DE27 patents

⚠️ This page may combine multiple inventors who share the name “PURKL FABIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PURKL FABIAN

BOSCH GMBH ROBERT

MEMS component including a sound-pressure-sensitive diaphragm element and piezosensitive signal detection

MEMS device having a getter

MEMS component including a sound-pressure-sensitive diaphragm element

Semiconductor sensor having a suspended structure and method of forming a semiconductor sensor having a suspended structure

Metamaterial and method for forming a metamaterial using atomic layer deposition

Suspension and absorber structure for bolometer

Serpentine IR sensor

Methods to combine radiation-based temperature sensor and inertial sensor and/or camera output in a handheld/mobile device

Thermally shorted bolometer

Thin-film encapsulated infrared sensor

Bolometer having absorber with pillar structure for thermal shorting

Micromechanical sound transducer system and corresponding manufacturing method

Method to modulate the sensitivity of a bolometer via negative interference

MEMS component including a diaphragm element which is attached via a spring structure to the component layer structure

Resistive switching for MEMS devices

Portable device with temperature sensing

Passivation layer for harsh environments and methods of fabrication thereof

MEMS infrared sensor including a plasmonic lens

Anisotropic conductor and method of fabrication thereof

Multi-stack film bolometer

Method of manufacturing a sensor device having a porous thin-film metal electrode

Production method for a layer structure and layer structure

CMOS bolometer

MEMS infrared sensor including a plasmonic lens

Titanium nitride for MEMS bolometers

YAMA GARY

Atomic layer deposition strengthening members and method of manufacture

KAUFMANN TIMO

Magnetic field sensor