P

Inventor

SUGIURA TETSURO

JP24 patents
⚠️ This page may combine multiple inventors who share the name “SUGIURA TETSURO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

14 patents
US6332925B1Dec 25, 2001

Evacuation system

EBARA CORP46 citations92
US6158226ADec 12, 2000

Trapping device

EBARA CORP19 citations92
US6051053AApr 18, 2000

Trapping device and method of operation therefor

EBARA CORP20 citations92
US10978315B2Apr 13, 2021

Vacuum evacuation system

EBARA CORP5 citations72
US9822974B2Nov 21, 2017

Vacuum pump with abatement function

EBARA CORP4 citations72
US9364786B2Jun 14, 2016

Exhaust gas abatement apparatus

EBARA CORP2 citations62
US11198160B2Dec 14, 2021

Detoxifying device, method of replacing piping section of detoxifying device, and method of cleaning piping of detoxifying device

EBARA CORP0 citations51
US10632419B2Apr 28, 2020

Vacuum pump with abatement function

EBARA CORP0 citations51
US10040026B2Aug 7, 2018

Fan scrubber and vacuum pump apparatus

EBARA CORP1 citations51
US9956524B2May 1, 2018

Vacuum pump with abatement function

EBARA CORP1 citations51
US11396876B2Jul 26, 2022

Control device, control system, control method, recording medium and machine learning device

EBARA CORP0 citations49
US12577952B2Mar 17, 2026

Information processing apparatus, information processing system, information processing method, program, substrate processing apparatus, criterion data determination apparatus, and criterion data determination method

EBARA CORP0 citations46
US11946470B2Apr 2, 2024

Information processing apparatus, information processing system, information processing method, program, substrate processing apparatus, criterion data determination apparatus, and criterion data determination method

EBARA CORP0 citations46
US10143964B2Dec 4, 2018

Vacuum pump with abatement function

EBARA CORP0 citations41

TOYOTA MOTOR CO LTD

5 patents

ITO KAZUMA

2 patents

SUGIURA TETSURO

1 patent

KIDO KOICHI

1 patent

SYSMEX CORP

1 patent