Inventor
KYOTANI TAKASHI
JP18 patents
⚠️ This page may combine multiple inventors who share the name “KYOTANI TAKASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
12 patentsUS6682002B2Jan 27, 2004
Ejector
EBARA CORP104 citations97
US6949225B1Sep 27, 2005
Method and apparatus for treating a waste gas containing fluorine-containing compounds
EBARA CORP14 citations83
US6953557B1Oct 11, 2005
Process and apparatus for treating semiconductor production exhaust gases
EBARA CORP8 citations73
US6409802B1Jun 25, 2002
Method for preventing scaling in wet-process waste gas treatment equipment
EBARA CORP8 citations73
US10978315B2Apr 13, 2021
Vacuum evacuation system
EBARA CORP5 citations72
US9822974B2Nov 21, 2017
Vacuum pump with abatement function
EBARA CORP4 citations72
US9364786B2Jun 14, 2016
Exhaust gas abatement apparatus
EBARA CORP2 citations62
US7736440B2Jun 15, 2010
Method and apparatus for preventing adherence of solid products in gas exhaust pipe and exhaust gas abatement device with same apparatus
EBARA CORP3 citations59
US10632419B2Apr 28, 2020
Vacuum pump with abatement function
EBARA CORP0 citations51
US10040026B2Aug 7, 2018
Fan scrubber and vacuum pump apparatus
EBARA CORP1 citations51
US9956524B2May 1, 2018
Vacuum pump with abatement function
EBARA CORP1 citations51
US10143964B2Dec 4, 2018
Vacuum pump with abatement function
EBARA CORP0 citations41