Inventor
NAKAZAWA TOSHIHARU
JP40 patents
⚠️ This page may combine multiple inventors who share the name “NAKAZAWA TOSHIHARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
34 patentsUS6700273B1Mar 2, 2004
Gas transfer machine
EBARA CORP24 citations92
US6464472B1Oct 15, 2002
Circulation fan apparatus and circulation-fan driving motor
EBARA CORP25 citations92
US5679992AOct 21, 1997
Bearing unit
EBARA CORP38 citations91
US5618167AApr 8, 1997
Vacuum pump apparatus having peltier elements for cooling the motor & bearing housing and heating the outer housing
EBARA CORP47 citations89
US6539043B1Mar 25, 2003
Discharge-pumped excimer laser device
EBARA CORP18 citations84
US6326712B1Dec 4, 2001
Magnetic bearing device
EBARA CORP17 citations84
US9614411B2Apr 4, 2017
Canned motor and vacuum pump
EBARA CORP7 citations83
US6617722B2Sep 9, 2003
Magnetic levitation rotating machine
EBARA CORP13 citations83
US6404088B1Jun 11, 2002
Magnetic bearing device
EBARA CORP19 citations83
US6220831B1Apr 24, 2001
Turbomolecular pump
EBARA CORP18 citations83
US7360454B2Apr 22, 2008
Flowmeter having a float and a displacement sensor
EBARA CORP18 citations82
US5107210AApr 21, 1992
Displacement sensing circuit with coil and band pass filter for attenuating external interference
EBARA CORP21 citations81
US6366039B1Apr 2, 2002
Excimer laser device
EBARA CORP12 citations74
US6062810AMay 16, 2000
Turbomolecular pump
EBARA CORP12 citations73
US9822974B2Nov 21, 2017
Vacuum pump with abatement function
EBARA CORP4 citations72
US6873075B2Mar 29, 2005
Magnetic bearing control device
EBARA CORP10 citations72
US6455966B1Sep 24, 2002
Magnetic bearing device for motor-combined structure
EBARA CORP12 citations72
US6398524B1Jun 4, 2002
Magnetic bearing control device and turbo-molecular pump device
EBARA CORP10 citations72
US6881268B2Apr 19, 2005
Method and apparatus for forming required gas atmosphere
EBARA CORP11 citations70
US6603787B1Aug 5, 2003
Discharge-pumped excimer laser device
EBARA CORP5 citations63
US9429166B2Aug 30, 2016
Sealing structure, vacuum pump motor including same sealing structure, and vacuum pump
EBARA CORP2 citations62
US9364786B2Jun 14, 2016
Exhaust gas abatement apparatus
EBARA CORP2 citations62
US7518332B2Apr 14, 2009
Brushless synchronous motor and driving control apparatus therefor
EBARA CORP4 citations61
US6809448B2Oct 26, 2004
Excimer laser apparatus
EBARA CORP6 citations61
US6092994AJul 25, 2000
Liquid delivery device, method of controlling such liquid delivery device, and liquid delivery pump
EBARA CORP6 citations60
US6785314B2Aug 31, 2004
Electric discharge gas laser
EBARA CORP2 citations59
US6404794B1Jun 11, 2002
Excimer laser apparatus
EBARA CORP4 citations59
US6307294B1Oct 23, 2001
Magnetic suspending device controlled by temperature of controlled object
EBARA CORP3 citations59
US10632419B2Apr 28, 2020
Vacuum pump with abatement function
EBARA CORP0 citations51
US10320260B2Jun 11, 2019
Canned motor and vacuum pump
EBARA CORP0 citations51
US9956524B2May 1, 2018
Vacuum pump with abatement function
EBARA CORP1 citations51
US9660496B2May 23, 2017
Canned motor and vacuum pump
EBARA CORP0 citations51
US9291155B2Mar 22, 2016
Vacuum pump motor and vacuum pump having balance rings
EBARA CORP1 citations51
US10143964B2Dec 4, 2018
Vacuum pump with abatement function
EBARA CORP0 citations41
CKD CORP
4 patentsUS11788777B2Oct 17, 2023
Temperature control system and integrated temperature control system
CKD CORP2 citations70
US11796247B2Oct 24, 2023
Temperature control system
CKD CORP0 citations49
US11703284B2Jul 18, 2023
Temperature control system and integrated temperature control system
CKD CORP0 citations49
US11656016B2May 23, 2023
Cooling system that comprises multiple cooling apparatus and reduces power consumption
CKD CORP0 citations49