P
PatentIndex
Search
Landscape
Sign in
Inventor
THEDJOISWORO BAYU
US
4 patents
⚠️ This page may combine multiple inventors who share the name “THEDJOISWORO BAYU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
2 patents
US9034773B2
May 19, 2015
Removal of native oxide with high selectivity
NOVELLUS SYSTEMS INC
8 citations
82
US8916477B2
Dec 23, 2014
Polysilicon etch with high selectivity
NOVELLUS SYSTEMS INC
17 citations
82
LAM RES CORP
1 patent
US9558928B2
Jan 31, 2017
Contact clean in high-aspect ratio structures
LAM RES CORP
7 citations
81
SHAVIV ROEY
1 patent
US9613825B2
Apr 4, 2017
Photoresist strip processes for improved device integrity
SHAVIV ROEY
2 citations
67