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Inventor
OGASAWARA KAZUHISA
JP
4 patents
⚠️ This page may combine multiple inventors who share the name “OGASAWARA KAZUHISA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SES CO LTD
2 patents
US7437834B2
Oct 21, 2008
Method of processing substrate and substrate processing apparatus
SES CO LTD
30 citations
85
US7648580B2
Jan 19, 2010
Substrate processing method and substrate processing device
SES CO LTD
8 citations
77
S E S COMPANY LTD
1 patent
US6637445B2
Oct 28, 2003
Substrate processing unit
S E S COMPANY LTD
22 citations
86
ACT FIVE CO LTD
1 patent
US9739707B2
Aug 22, 2017
Oil concentration measurement system and oil concentration measurement method
ACT FIVE CO LTD
0 citations
30