Inventor

YUE LIWAN

CN9 patents

⚠️ This page may combine multiple inventors who share the name “YUE LIWAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SEMICONDUCTOR MFG INT SHANGHAI CORP

7 patents

US10042269B2Aug 7, 2018

Apparatus and method for overlay measurement

SEMICONDUCTOR MFG INT SHANGHAI CORP2 citations72

US10613307B2Apr 7, 2020

Integrated rotary structure and fabrication method thereof

SEMICONDUCTOR MFG INT SHANGHAI CORP0 citations50

US10187964B2Jan 22, 2019

Calibrating apparatus and method

SEMICONDUCTOR MFG INT SHANGHAI CORP0 citations50

US9992857B2Jun 5, 2018

Light source and photolithography apparatus containing the same, calibrating apparatus and method

SEMICONDUCTOR MFG INT SHANGHAI CORP0 citations50

US9927601B2Mar 27, 2018

Extreme ultraviolet light source, exposure apparatus, and integrated rotary structure fabricating method

SEMICONDUCTOR MFG INT SHANGHAI CORP0 citations50

US9706632B2Jul 11, 2017

EUV light source and exposure apparatus

SEMICONDUCTOR MFG INT SHANGHAI CORP0 citations50

US10553470B2Feb 4, 2020

Wafer alignment method and apparatus for overlay measurement

SEMICONDUCTOR MFG INT SHANGHAI CORP0 citations40

SEMICONDUCTOR MFG INTERNATIONAL (SHANGHAI) CORPORATION

1 patent

US9835956B2Dec 5, 2017

Apparatus and method for overlay measurement

SEMICONDUCTOR MFG INTERNATIONAL (SHANGHAI) CORPORATION4 citations72

SEMICONDUCTOR MFG INT SHANGHAI

1 patent

US9332626B1May 3, 2016

EUV light source and exposure apparatus

SEMICONDUCTOR MFG INT SHANGHAI2 citations61