Inventor
LANE SCOTT
US12 patents
⚠️ This page may combine multiple inventors who share the name “LANE SCOTT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ATMI ECOSYS CORP
5 patentsUS5955037ASep 21, 1999
Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases
ATMI ECOSYS CORP156 citations97
US5935283AAug 10, 1999
Clog-resistant entry structure for introducing a particulate solids-containing and/or solids-forming gas stream to a gas processing system
ATMI ECOSYS CORP85 citations95
US5846275ADec 8, 1998
Clog-resistant entry structure for introducing a particulate solids-containing and/or solids-forming gas stream to a gas processing system
ATMI ECOSYS CORP64 citations95
US5851293ADec 22, 1998
Flow-stabilized wet scrubber system for treatment of process gases from semiconductor manufacturing operations
ATMI ECOSYS CORP339 citations93
US5833888ANov 10, 1998
Weeping weir gas/liquid interface structure
ATMI ECOSYS CORP53 citations91
APPLIED MATERIALS INC
2 patentsUS7695700B2Apr 13, 2010
Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases
APPLIED MATERIALS INC11 citations92
US7214349B2May 8, 2007
Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases
APPLIED MATERIALS INC24 citations92