Inventor

SAKU TOMONOBU

JP3 patents

Patents

3 patents

US9952506B2Apr 24, 2018

Liquid discharge apparatus, imprint apparatus, and article manufacturing method

CANON KK17 citations83

US10315354B2Jun 11, 2019

Imprint apparatus and method of manufacturing article

CANON KK1 citations59

US11511315B2Nov 29, 2022

Liquid ejection device, imprint apparatus, and examination method

CANON KK0 citations54