Inventor
UMEDA SHOTA
JP8 patents
⚠️ This page may combine multiple inventors who share the name “UMEDA SHOTA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
6 patentsUS12014909B2Jun 18, 2024
Plasma processing apparatus and plasma processing system
HITACHI HIGH TECH CORP0 citations61
US11289313B2Mar 29, 2022
Plasma processing apparatus
HITACHI HIGH TECH CORP1 citations61
US10872750B2Dec 22, 2020
Plasma processing apparatus and plasma processing system
HITACHI HIGH TECH CORP1 citations61
US12040167B2Jul 16, 2024
Diagnosis apparatus, plasma processing apparatus and diagnosis method
HITACHI HIGH TECH CORP0 citations51
US12444591B2Oct 14, 2025
Diagnosis device, diagnosis method, plasma processing apparatus, and semiconductor device manufacturing system
HITACHI HIGH TECH CORP0 citations50
US12387921B2Aug 12, 2025
Apparatus diagnostic apparatus, apparatus diagnostic method, plasma processing apparatus and semiconductor device manufacturing system
HITACHI HIGH TECH CORP0 citations50