Inventor
FABRIKANT ANATOLY
US30 patents
⚠️ This page may combine multiple inventors who share the name “FABRIKANT ANATOLY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR TECH CORP
16 patentsUS7317531B2Jan 8, 2008
Apparatus and methods for detecting overlay errors using scatterometry
KLA TENCOR TECH CORP83 citations98
US7280230B2Oct 9, 2007
Parametric profiling using optical spectroscopic systems
KLA TENCOR TECH CORP71 citations97
US7433040B2Oct 7, 2008
Apparatus and methods for detecting overlay errors using scatterometry
KLA TENCOR TECH CORP28 citations96
US7385699B2Jun 10, 2008
Apparatus and methods for detecting overlay errors using scatterometry
KLA TENCOR TECH CORP34 citations96
US7301634B2Nov 27, 2007
Apparatus and methods for detecting overlay errors using scatterometry
KLA TENCOR TECH CORP35 citations96
US7298481B2Nov 20, 2007
Apparatus and methods for detecting overlay errors using scatterometry
KLA TENCOR TECH CORP46 citations96
US7289213B2Oct 30, 2007
Apparatus and methods for detecting overlay errors using scatterometry
KLA TENCOR TECH CORP49 citations96
US7099005B1Aug 29, 2006
System for scatterometric measurements and applications
KLA TENCOR TECH CORP49 citations96
US6900892B2May 31, 2005
Parametric profiling using optical spectroscopic systems
KLA TENCOR TECH CORP66 citations96
US7933016B2Apr 26, 2011
Apparatus and methods for detecting overlay errors using scatterometry
KLA TENCOR TECH CORP15 citations92
US7876440B2Jan 25, 2011
Apparatus and methods for detecting overlay errors using scatterometry
KLA TENCOR TECH CORP13 citations92
US7663753B2Feb 16, 2010
Apparatus and methods for detecting overlay errors using scatterometry
KLA TENCOR TECH CORP19 citations92
US7564557B2Jul 21, 2009
Apparatus and methods for detecting overlay errors using scatterometry
KLA TENCOR TECH CORP19 citations92
US7301649B2Nov 27, 2007
System for scatterometric measurements and applications
KLA TENCOR TECH CORP21 citations92
US7312881B2Dec 25, 2007
Parametric profiling using optical spectroscopic systems to adjust processing parameter
KLA TENCOR TECH CORP7 citations74
US7023549B2Apr 4, 2006
Parametric profiling using optical spectroscopic systems
KLA TENCOR TECH CORP7 citations74
AMO DEV LLC
10 patentsUS9498117B2Nov 22, 2016
Systems and methods for treatment deconvolution using dual scale kernels
AMO DEV LLC7 citations84
US9510747B2Dec 6, 2016
System and method for ophthalmic surface measurements based on objective quality estimation
AMO DEV LLC3 citations73
US10292864B2May 21, 2019
Wavefront measurement pre-smoothing systems and methods
AMO DEV LLC0 citations52
US10098783B2Oct 16, 2018
Tilt compensation, measurement, and associated adjustment of refractive prescriptions during surgical and other treatments of the eye
AMO DEV LLC1 citations52
US10098785B2Oct 16, 2018
Treatment validation systems and methods
AMO DEV LLC0 citations52
US9814620B2Nov 14, 2017
Systems and methods for treatment deconvolution using multi-scale kernels
AMO DEV LLC0 citations52
US9659151B2May 23, 2017
Systems and methods for treatment target deconvolution
AMO DEV LLC0 citations52
US9655513B2May 23, 2017
Wavefront measurement pre-smoothing systems and methods
AMO DEV LLC0 citations52
US9501621B2Nov 22, 2016
Treatment validation systems and methods
AMO DEV LLC1 citations52
US10028862B2Jul 24, 2018
Compensation systems and methods for flap induced aberrations
AMO DEV LLC0 citations37