Inventor
MITA YUTAKA
JP15 patents
Patents
15 patentsUS9952506B2Apr 24, 2018
Liquid discharge apparatus, imprint apparatus, and article manufacturing method
CANON KK17 citations83
US10518546B2Dec 31, 2019
Liquid discharge apparatus, imprint apparatus and part manufacturing method
CANON KK5 citations72
US10093103B2Oct 9, 2018
Liquid discharge apparatus, imprint apparatus, and article manufacturing method
CANON KK6 citations72
US10067420B2Sep 4, 2018
Imprint apparatus and method of manufacturing article
CANON KK3 citations72
US9834002B2Dec 5, 2017
Liquid discharge apparatus, imprint apparatus and part manufacturing method
CANON KK5 citations72
US10421283B2Sep 24, 2019
Ejection material receiving unit, ejection material ejecting apparatus, and manufacturing method of flexible member
CANON KK2 citations71
US10245835B2Apr 2, 2019
Liquid discharging apparatus, imprint apparatus, and method of manufacturing a component
CANON KK3 citations71
US10894420B2Jan 19, 2021
Ejection-material injecting method, ejection-material ejection apparatus, and imprinting apparatus
CANON KK0 citations62
US10513125B2Dec 24, 2019
Fluid containing member
CANON KK1 citations61
US10406731B2Sep 10, 2019
Application device, imprinting apparatus, and method for manufacturing object
CANON KK0 citations52
US10022900B2Jul 17, 2018
Application device, imprinting apparatus, and method for manufacturing object
CANON KK0 citations52
US11745409B2Sep 5, 2023
Storage device, ejection-material ejection device, and imprint apparatus
CANON KK0 citations51
US11573487B2Feb 7, 2023
Imprint apparatus, imprinting method, and method of manufacturing article
CANON KK0 citations50
US10384451B2Aug 20, 2019
Liquid discharge apparatus, imprint apparatus, and method of manufacturing a component
CANON KK0 citations41
US10254643B2Apr 9, 2019
Imprint apparatus and method of manufacturing article
CANON KK0 citations41