Inventor

HAMMOND IV EDWARD P

US23 patents

⚠️ This page may combine multiple inventors who share the name “HAMMOND IV EDWARD P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HAMMOND IV EDWARD P

APPLIED MATERIALS INC

Plasma reactor apparatus with independent capacitive and toroidal plasma sources

Process using combined capacitively and inductively coupled plasma sources for controlling plasma ion radial distribution

Plasma reactor apparatus with a VHF capacitively coupled plasma source of variable frequency

Plasma process for inductively coupling power through a gas distribution plate while adjusting plasma distribution

Multi-step process for forming a metal barrier in a sputter reactor

Plasma parameters and skew characterization by high speed imaging

Electrostatic chuck with multiple radio frequency meshes to control plasma uniformity

Electrostatic chuck with multiple radio frequency meshes to control plasma uniformity

Device and method for tuning plasma distribution using phase control

Dual plasma source process using a variable frequency capacitively coupled source to control plasma ion density

Plasma parameters and skew characterization by high speed imaging

Selective deposition of hardmask

RF grounding configuration for pedestals

Plasma-enhanced chemical vapor deposition of carbon hard-mask

Ground path systems for providing a shorter and symmetrical ground path

Dual-feed tunable plasma source

Dual radio-frequency tuner for process control of a plasma process

Gate profile control through effective frequency of dual HF/VHF sources in a plasma etch process

RF power delivery architecture with switchable match and frequency tuning

GUNG TZA-JING

Electromagnet array in a sputter reactor

KATZ DAN

Plasma reactor with center-fed multiple zone gas distribution for improved uniformity of critical dimension bias

BELEN RODOLFO P

Method to control uniformity using tri-zone showerhead

BAEK JONGHOON

Anti-arc zero field plate