Inventor
CHUNG HSIEN-TA
TW7 patents
Patents
7 patentsUS6159845ADec 12, 2000
Method for manufacturing dielectric layer
UNITED MICROELECTRONICS CORP111 citations97
US6184142B1Feb 6, 2001
Process for low k organic dielectric film etch
UNITED MICROELECTRONICS CORP81 citations96
US6017817AJan 25, 2000
Method of fabricating dual damascene
UNITED MICROELECTRONICS CORP83 citations95
US6254676B1Jul 3, 2001
Method for manufacturing metal oxide semiconductor transistor having raised source/drain
UNITED MICROELECTRONICS CORP28 citations92
US10290728B2May 14, 2019
Semiconductor device and manufacturing method thereof
UNITED MICROELECTRONICS CORP2 citations71
US9391177B1Jul 12, 2016
Method of fabricating semiconductor structure
UNITED MICROELECTRONICS CORP1 citations50
US10950712B2Mar 16, 2021
Semiconductor device and method for fabricating the same
UNITED MICROELECTRONICS CORP0 citations49