Inventor
PAUL KHOKAN C
US7 patents
Patents
7 patentsUS10388549B2Aug 20, 2019
On-board metrology (OBM) design and implication in process tool
APPLIED MATERIALS INC8 citations79
US10281261B2May 7, 2019
In-situ metrology method for thickness measurement during PECVD processes
APPLIED MATERIALS INC2 citations72
US12492890B2Dec 9, 2025
In-situ reflectometry for real-time process control
APPLIED MATERIALS INC0 citations61
US10373823B2Aug 6, 2019
Deployment of light energy within specific spectral bands in specific sequences for deposition, treatment and removal of materials
APPLIED MATERIALS INC1 citations60
US12592363B2Mar 31, 2026
Actively controlled gas inject for process temperature control
APPLIED MATERIALS INC0 citations59
US10527407B2Jan 7, 2020
In-situ metrology method for thickness measurement during PECVD processes
APPLIED MATERIALS INC0 citations51
US12417890B2Sep 16, 2025
Methods, systems, and apparatus for monitoring radiation output of lamps
APPLIED MATERIALS INC0 citations50