Inventor
BUDIARTO EDWARD
US12 patents
⚠️ This page may combine multiple inventors who share the name “BUDIARTO EDWARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
10 patentsUS9157730B2Oct 13, 2015
PECVD process
APPLIED MATERIALS INC49 citations97
US9816187B2Nov 14, 2017
PECVD process
APPLIED MATERIALS INC8 citations92
US9458537B2Oct 4, 2016
PECVD process
APPLIED MATERIALS INC12 citations92
US10793954B2Oct 6, 2020
PECVD process
APPLIED MATERIALS INC3 citations84
US10060032B2Aug 28, 2018
PECVD process
APPLIED MATERIALS INC3 citations84
US10886155B2Jan 5, 2021
Optical stack deposition and on-board metrology
APPLIED MATERIALS INC7 citations79
US11613812B2Mar 28, 2023
PECVD process
APPLIED MATERIALS INC2 citations73
US10281261B2May 7, 2019
In-situ metrology method for thickness measurement during PECVD processes
APPLIED MATERIALS INC2 citations72
US10030306B2Jul 24, 2018
PECVD apparatus and process
APPLIED MATERIALS INC1 citations62
US10527407B2Jan 7, 2020
In-situ metrology method for thickness measurement during PECVD processes
APPLIED MATERIALS INC0 citations51