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Inventor

LEE JEONGMIN

US32 patents
⚠️ This page may combine multiple inventors who share the name “LEE JEONGMIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

18 patents
US9157730B2Oct 13, 2015

PECVD process

APPLIED MATERIALS INC49 citations97
US9816187B2Nov 14, 2017

PECVD process

APPLIED MATERIALS INC8 citations92
US9458537B2Oct 4, 2016

PECVD process

APPLIED MATERIALS INC12 citations92
US10793954B2Oct 6, 2020

PECVD process

APPLIED MATERIALS INC3 citations84
US10060032B2Aug 28, 2018

PECVD process

APPLIED MATERIALS INC3 citations84
US11613812B2Mar 28, 2023

PECVD process

APPLIED MATERIALS INC2 citations73
US10281261B2May 7, 2019

In-situ metrology method for thickness measurement during PECVD processes

APPLIED MATERIALS INC2 citations72
US11031262B2Jun 8, 2021

Loadlock integrated bevel etcher system

APPLIED MATERIALS INC2 citations71
US10636684B2Apr 28, 2020

Loadlock integrated bevel etcher system

APPLIED MATERIALS INC1 citations71
US10403515B2Sep 3, 2019

Loadlock integrated bevel etcher system

APPLIED MATERIALS INC1 citations71
US10276364B2Apr 30, 2019

Bevel etch profile control

APPLIED MATERIALS INC3 citations70
US11948790B2Apr 2, 2024

Heater support kit for bevel etch chamber

APPLIED MATERIALS INC0 citations62
US11898249B2Feb 13, 2024

PECVD process

APPLIED MATERIALS INC0 citations62
US10903066B2Jan 26, 2021

Heater support kit for bevel etch chamber

APPLIED MATERIALS INC1 citations62
US10030306B2Jul 24, 2018

PECVD apparatus and process

APPLIED MATERIALS INC1 citations62
US10629427B2Apr 21, 2020

Bevel etch profile control

APPLIED MATERIALS INC1 citations60
US10527407B2Jan 7, 2020

In-situ metrology method for thickness measurement during PECVD processes

APPLIED MATERIALS INC0 citations51
US10599043B2Mar 24, 2020

Critical methodology in vacuum chambers to determine gap and leveling between wafer and hardware components

APPLIED MATERIALS INC0 citations50

LG MAGNA E POWERTRAIN CO LTD

3 patents

SAMSUNG ELECTRONICS CO LTD

3 patents

LG CHEMICAL LTD

2 patents

SENTRONIX CO LTD

1 patent

AMOREPACIFIC CORP

1 patent

SAMSUNG LIFE PUBLIC WELFARE FOUNDATION

1 patent

UNIV SUNGKYUNKWAN RES & BUS

1 patent

JANG SUNGUK

1 patent

PARK CHANG MAN

1 patent