Inventor
LEE TERRANCE Y
US21 patents
⚠️ This page may combine multiple inventors who share the name “LEE TERRANCE Y”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
20 patentsUS9744724B2Aug 29, 2017
Apparatus for printing a chemical mechanical polishing pad
APPLIED MATERIALS INC42 citations97
US9457520B2Oct 4, 2016
Apparatus for printing a chemical mechanical polishing pad
APPLIED MATERIALS INC48 citations97
US9157730B2Oct 13, 2015
PECVD process
APPLIED MATERIALS INC49 citations97
US5292399AMar 8, 1994
Plasma etching apparatus with conductive means for inhibiting arcing
APPLIED MATERIALS INC123 citations95
US10029405B2Jul 24, 2018
Printing a chemical mechanical polishing pad
APPLIED MATERIALS INC24 citations94
US9816187B2Nov 14, 2017
PECVD process
APPLIED MATERIALS INC8 citations92
US9458537B2Oct 4, 2016
PECVD process
APPLIED MATERIALS INC12 citations92
US10843306B2Nov 24, 2020
Printing a chemical mechanical polishing pad
APPLIED MATERIALS INC3 citations84
US10793954B2Oct 6, 2020
PECVD process
APPLIED MATERIALS INC3 citations84
US10500694B2Dec 10, 2019
Chemical mechanical polishing apparatus and methods
APPLIED MATERIALS INC7 citations84
US10060032B2Aug 28, 2018
PECVD process
APPLIED MATERIALS INC3 citations84
US11673225B2Jun 13, 2023
Printing a chemical mechanical polishing pad
APPLIED MATERIALS INC1 citations73
US11613812B2Mar 28, 2023
PECVD process
APPLIED MATERIALS INC2 citations73
US11207758B2Dec 28, 2021
Printing a chemical mechanical polishing pad
APPLIED MATERIALS INC2 citations73
US10281261B2May 7, 2019
In-situ metrology method for thickness measurement during PECVD processes
APPLIED MATERIALS INC2 citations72
US12011801B2Jun 18, 2024
Printing a chemical mechanical polishing pad
APPLIED MATERIALS INC0 citations62
US11898249B2Feb 13, 2024
PECVD process
APPLIED MATERIALS INC0 citations62
US11453097B2Sep 27, 2022
Chemical mechanical polishing apparatus and methods
APPLIED MATERIALS INC0 citations62
US10030306B2Jul 24, 2018
PECVD apparatus and process
APPLIED MATERIALS INC1 citations62
US10527407B2Jan 7, 2020
In-situ metrology method for thickness measurement during PECVD processes
APPLIED MATERIALS INC0 citations51