Inventor
DEVARAJAN THAMARAI S
US14 patents
Patents
14 patentsUS9754798B1Sep 5, 2017
Hybridization fin reveal for uniform fin reveal depth across different fin pitches
IBM17 citations92
US9691765B1Jun 27, 2017
Fin type field effect transistors with different pitches and substantially uniform fin reveal
IBM12 citations84
US9679780B1Jun 13, 2017
Polysilicon residue removal in nanosheet MOSFETs
IBM11 citations84
US11302797B2Apr 12, 2022
Approach to bottom dielectric isolation for vertical transport fin field effect transistors
IBM1 citations73
US10840354B2Nov 17, 2020
Approach to bottom dielectric isolation for vertical transport fin field effect transistors
IBM3 citations73
US10629702B2Apr 21, 2020
Approach to bottom dielectric isolation for vertical transport fin field effect transistors
IBM3 citations73
US10366928B2Jul 30, 2019
Hybridization fin reveal for uniform fin reveal depth across different fin pitches
IBM1 citations73
US10020229B2Jul 10, 2018
Fin type field effect transistors with different pitches and substantially uniform fin reveal
IBM2 citations73
US10896816B2Jan 19, 2021
Silicon residue removal in nanosheet transistors
IBM4 citations71
US10242882B2Mar 26, 2019
Cyclic etch process to remove dummy gate oxide layer for fin field effect transistor fabrication
IBM1 citations62
US10388571B2Aug 20, 2019
Fin type field effect transistors with different pitches and substantially uniform fin reveal
IBM0 citations52
US10163721B2Dec 25, 2018
Hybridization fin reveal for uniform fin reveal depth across different fin pitches
IBM0 citations52
US9997352B2Jun 12, 2018
Polysilicon residue removal in nanosheet MOSFETs
IBM1 citations52
US9935015B1Apr 3, 2018
Hybridization fin reveal for uniform fin reveal depth across different fin pitches
IBM0 citations52