Inventor
HU WEI-CHUNG
TW10 patents
Patents
10 patentsUS10304178B2May 28, 2019
Method and system for diagnosing a semiconductor wafer
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations83
US11429019B2Aug 30, 2022
Method for manufacturing semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US10866508B2Dec 15, 2020
Method for manufacturing photomask and semiconductor manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11402743B2Aug 2, 2022
Mask defect prevention
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US11669957B2Jun 6, 2023
Semiconductor wafer measurement method and system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11094057B2Aug 17, 2021
Semiconductor wafer measurement method and system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12174529B2Dec 24, 2024
Method for manufacturing semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12124163B2Oct 22, 2024
Mask defect prevention
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11860530B2Jan 2, 2024
Mask defect prevention
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10762621B2Sep 1, 2020
Semiconductor wafer measurement method and system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51