Inventor

LU CHI-TA

TW19 patents

⚠️ This page may combine multiple inventors who share the name “LU CHI-TA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LU CHI-TA

TAIWAN SEMICONDUCTOR MFG CO LTD

Using inverse lithography technology in a method of mask data preparation for generating integrated circuit

Method for manufacturing semiconductor device

Method for manufacturing photomask and semiconductor manufacturing method thereof

Semiconductor structure and manufacturing method thereof

Mask defect prevention

Semiconductor structure and manufacturing method thereof

Critical dimension uniformity

Critical dimension uniformity

Semiconductor structure and manufacturing method thereof

Critical dimension uniformity

Method for manufacturing semiconductor device

Mask defect prevention

Mask defect prevention

Method and system for reducing layout distortion due to exposure non-uniformity

Method and system for reducing layout distortion due to exposure non-uniformity

Mask and method for fabricating the same

LU CHI-TA

Cycle time reduction in data preparation

Lithography performance check methods and apparatus

Structure and method for E-beam writing