Inventor
MATHIEU BENOIT
FR11 patents
⚠️ This page may combine multiple inventors who share the name “MATHIEU BENOIT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
COMMISSARIAT ENERGIE ATOMIQUE
8 patentsUS10115637B2Oct 30, 2018
Method for fabricating auto-aligned interconnection elements for a 3D integrated circuit
COMMISSARIAT ENERGIE ATOMIQUE3 citations72
US10147818B2Dec 4, 2018
Enhanced method of stressing a transistor channel zone
COMMISSARIAT ENERGIE ATOMIQUE2 citations71
US10586740B2Mar 10, 2020
Method for manufacturing pairs of CMOS transistors of the “fin-FET” type at low temperatures
COMMISSARIAT ENERGIE ATOMIQUE1 citations60
US12140573B2Nov 12, 2024
Bench for mechanical characterisation of thin objects
COMMISSARIAT ENERGIE ATOMIQUE1 citations53
US12135260B2Nov 5, 2024
Bench for mechanically characterising thin objects with increased reliability
COMMISSARIAT ENERGIE ATOMIQUE0 citations47
US9997395B2Jun 12, 2018
Fabrication method of a stack of electronic devices
COMMISSARIAT ENERGIE ATOMIQUE0 citations46
US12252807B2Mar 18, 2025
Process for obtaining a nitride layer
COMMISSARIAT ENERGIE ATOMIQUE0 citations42
US9853130B2Dec 26, 2017
Method of modifying the strain state of a semiconducting structure with stacked transistor channels
COMMISSARIAT ENERGIE ATOMIQUE0 citations40