Inventor
IMAI MASAYOSHI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “IMAI MASAYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
9 patentsUS9666455B2May 30, 2017
Substrate cleaning apparatus
EBARA CORP2 citations71
US12463062B2Nov 4, 2025
Substrate processing apparatus, computer-readable storage medium storing a program, and substrate processing method
EBARA CORP0 citations51
US10500691B2Dec 10, 2019
Substrate processing apparatus and substrate processing method
EBARA CORP0 citations51
US11495475B2Nov 8, 2022
Method of cleaning a substrate
EBARA CORP0 citations50
US10607862B2Mar 31, 2020
Substrate cleaning apparatus
EBARA CORP0 citations50
US11848216B2Dec 19, 2023
Cleaning apparatus for cleaning member, substrate cleaning apparatus and cleaning member assembly
EBARA CORP0 citations47
US10438818B2Oct 8, 2019
Substrate processing apparatus and pipe cleaning method for substrate processing apparatus
EBARA CORP0 citations41
US10985037B2Apr 20, 2021
Substrate cleaning apparatus, substrate cleaning method, and control method of substrate cleaning apparatus
EBARA CORP0 citations40
US10229841B2Mar 12, 2019
Wafer drying apparatus and wafer drying method
EBARA CORP0 citations39
DAINIPPON SCREEN MFG
4 patentsUS7479205B2Jan 20, 2009
Substrate processing apparatus
DAINIPPON SCREEN MFG23 citations92
US6951221B2Oct 4, 2005
Substrate processing apparatus
DAINIPPON SCREEN MFG22 citations92
US7267130B2Sep 11, 2007
Substrate processing apparatus
DAINIPPON SCREEN MFG7 citations73
US7428907B2Sep 30, 2008
Substrate processing apparatus
DAINIPPON SCREEN MFG1 citations51