Inventor

MATYUSHKIN ALEXANDER

US23 patents

⚠️ This page may combine multiple inventors who share the name “MATYUSHKIN ALEXANDER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MATYUSHKIN ALEXANDER

LAM RES CORP

Low frequency RF generator and associated electrostatic chuck

Electrostatic Chuck design for cooling-gas light-up prevention

Electrostatic chuck with features for preventing electrical arcing and light-up and improving process uniformity

Electrostatic chuck design for cooling-gas light-up prevention

Electrostatic chuck design for cooling-gas light-up prevention

ESC assembly including an electrically conductive gasket for uniform RF power delivery therethrough

Electrostatic chucks with coolant gas zones and corresponding groove and monopolar electrostatic clamping electrode patterns

Electrostatic edge ring mounting system for substrate processing

Electrostatic chucks with coolant gas zones and corresponding groove and monopolar electrostatic clamping electrode patterns

Electrostatic chucks with coolant gas zones and corresponding groove and monopolar electrostatic clamping electrode patterns

Electrostatic chuck assembly incorporation a gasket for distributing RF power to a ceramic embedded electrode

Coolant channel with internal fins for substrate processing pedestals

APPLIED MATERIALS INC

Plasma reactor apparatus with independent capacitive and toroidal plasma sources

Process using combined capacitively and inductively coupled plasma sources for controlling plasma ion radial distribution

Plasma reactor apparatus with a VHF capacitively coupled plasma source of variable frequency

Method and apparatus for controlling temperature of a substrate

Substrate support assembly

Substrate support assembly having rapid temperature control

Dual plasma source process using a variable frequency capacitively coupled source to control plasma ion density

Heat transfer assembly

MATYUSHKIN ALEXANDER

Substrate support with electrostatic chuck having dual temperature zones

Substrate processing with rapid temperature gradient control

Electrostatic chuck having a plurality of heater coils