Inventor
LIU RAN
US22 patents
⚠️ This page may combine multiple inventors who share the name “LIU RAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNIV NORTHEASTERN
2 patentsKLA TENCOR CORP
2 patentsUS10460966B2Oct 29, 2019
Encapsulated instrumented substrate apparatus for acquiring measurement parameters in high temperature process applications
KLA TENCOR CORP13 citations81
US11823925B2Nov 21, 2023
Encapsulated instrumented substrate apparatus for acquiring measurement parameters in high temperature process applications
KLA TENCOR CORP0 citations59