Inventor
DOERING KENNETH BRIAN
US11 patents
Patents
11 patentsUS11584993B2Feb 21, 2023
Thermally uniform deposition station
APPLIED MATERIALS INC4 citations74
US11174553B2Nov 16, 2021
Gas distribution assembly for improved pump-purge and precursor delivery
APPLIED MATERIALS INC3 citations71
US12340980B2Jun 24, 2025
Plasma showerhead with improved uniformity
APPLIED MATERIALS INC0 citations62
US11584992B2Feb 21, 2023
Gas distribution assembly for improved pump-purge and precursor delivery
APPLIED MATERIALS INC0 citations61
US12257592B2Mar 25, 2025
Showerhead with embedded nut
APPLIED MATERIALS INC0 citations59
US11684941B2Jun 27, 2023
Showerhead with embedded nut
APPLIED MATERIALS INC0 citations59
US11577946B2Feb 14, 2023
Fail-safe pneumatic lift system
APPLIED MATERIALS INC0 citations55
US12408239B2Sep 2, 2025
PBN heaters for ALD temperature uniformity
APPLIED MATERIALS INC0 citations51
US12580159B2Mar 17, 2026
Plasma showerhead assembly and method of reducing defects
APPLIED MATERIALS INC0 citations49
US12442080B2Oct 14, 2025
Plasma showerhead assembly and method of reducing defects
APPLIED MATERIALS INC0 citations47
US12057333B2Aug 6, 2024
Metrology slot plates
APPLIED MATERIALS INC0 citations47