Inventor
SILVETTI MARIO D
US15 patents
⚠️ This page may combine multiple inventors who share the name “SILVETTI MARIO D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
14 patentsUS6927178B2Aug 9, 2005
Nitrogen-free dielectric anti-reflective coating and hardmask
APPLIED MATERIALS INC32 citations90
US7105460B2Sep 12, 2006
Nitrogen-free dielectric anti-reflective coating and hardmask
APPLIED MATERIALS INC8 citations73
US11174553B2Nov 16, 2021
Gas distribution assembly for improved pump-purge and precursor delivery
APPLIED MATERIALS INC3 citations71
US11081318B2Aug 3, 2021
Geometrically selective deposition of dielectric films utilizing low frequency bias
APPLIED MATERIALS INC2 citations71
US11923172B2Mar 5, 2024
Paired dynamic parallel plate capacitively coupled plasmas
APPLIED MATERIALS INC0 citations62
US11713508B2Aug 1, 2023
Apparatus and methods for improving chemical utilization rate in deposition process
APPLIED MATERIALS INC0 citations62
US11396703B2Jul 26, 2022
Apparatus and methods for improving chemical utilization rate in deposition process
APPLIED MATERIALS INC0 citations62
US11282676B2Mar 22, 2022
Paired dynamic parallel plate capacitively coupled plasmas
APPLIED MATERIALS INC0 citations62
US11584992B2Feb 21, 2023
Gas distribution assembly for improved pump-purge and precursor delivery
APPLIED MATERIALS INC0 citations61
US11692267B2Jul 4, 2023
Plasma induced modification of silicon carbide surface
APPLIED MATERIALS INC0 citations54
US12408239B2Sep 2, 2025
PBN heaters for ALD temperature uniformity
APPLIED MATERIALS INC0 citations51
US12305284B2May 20, 2025
Apparatus and methods for fine planar non-uniformity improvement
APPLIED MATERIALS INC0 citations51
US11976363B2May 7, 2024
Purge ring for pedestal assembly
APPLIED MATERIALS INC0 citations51
US11581213B2Feb 14, 2023
Susceptor wafer chucks for bowed wafers
APPLIED MATERIALS INC0 citations44